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产品展示 / products 您的位置:网站首页 > 产品展示 > > 轮廓仪 > μScanNanoFocus μScan(激光扫描轮廓仪)

NanoFocus μScan(激光扫描轮廓仪)

简要描述:AF2 自动对焦(Autofocus)

借由探测器的回馈讯号调整物镜位置,得到待测物焦点,而获得待测物的确实高度(如下左图)。

CF4 共轭焦(Confocal, Laser)

激光光束经由物镜迅速上下移动聚焦于待测物上,此时偵测器能经由孔洞得到Z大光的强度,如此侦测器根据此讯号确定其位置

  • 产品型号:μScan
  • 厂商性质:代理商
  • 更新时间:2018-05-14
  • 访  问  量:755
详情介绍

AF2 自动对焦(Autofocus)

借由探测器的回馈讯号调整物镜位置,得到待测物焦点,而获得待测物的确实高度(如下左图)。

CF4 共轭焦(Confocal, Laser)

激光光束经由物镜迅速上下移动聚焦于待测物上,此时偵测器能经由孔洞得到zui大光的强度,如此侦测器根据此讯号确定其位置(如下右图)。

AF2
 
CF4

n         应用

ü         集成电路封装和表面贴片技术

ü         厚膜混合电路:膜厚度的自动化测量

ü          精密部件

[1] BGA        [2] thick film     [3] dispenser dots     [4] laminate
n         技术参数

Scan modules

Measuring range in x,y-direction [mm]

Resolution in x,y-direction [mm]

Positioning range in z-direction [mm]

Max. measuring speed [mm/s]

SC 50

50X50

0.5

100

50

SC 100

100x100

0.5

100

50

SC 150

150x150

0.5

100

50

SC 200

200x200

0.5

100

50

other dimensions on request

 

Sensors

Resolution z [μm]

Resolution x,y [μm]

Working distance [mm]

Measuring range in z-direction [mm]

Camera (optional)

Confocal point sensor

CF 4

0.02

1

4

1.0

off-axis

 

CF 13

0.02

1

13

1.0

(BMT5)

Autofocus sensor

AF 2

0.025/0.0111)

1

2

1.5/0.651)

integrated

AF 5

0.025/0.0111)

1

5

1.5/0.651)

(BMT3)

Chromatic white light sensor

CRT 52)

0.010

4

5

0.3

off-axis (BMT5)

CRT 122)

0.025

4

12

1.0

CRT 162)

0.075

8

16

3.0

Holographic sensor

CP 15

3.0

12

12

1.8

integrated

(BMT 4)

CP 42

6.0

15

42

8.0

CP 65

10.0

25

65

18.0

1) with restricted measuring range 2) with 1, 4 or 30 kHz measuring frequency available

 

Modules

 

System controller

High performance industrial PC, DVD-Writer, network card,

Windows XP Professional

Cabinet and work table MT 70

Stable container for electronic modules with work table

1550x800x750 (lxh in mm)

Granite measuring stand MP 100

Portal construction, 660x450x497 (lxh in mm) for SC 50 to SC 150

Granite measuring stand MP 200

Portal construction, 680x480x385 (lxh in mm) from SC 200

NF μsoft standard software

NanoFocus control and evaluation software, profile and topography

representation, roughness calculation compliant with DIN EN ISO

 

 

 

 

Options

 

NF 3D-Plus

Photo-realistic 3D presentation of topographical data (OpenGL)

NF Active X

Interface modules to program individual measurement processes and

calculations (Excel/VBA)

NF Hybridmaster

Automation tool for the use of μscan® in thick film production incl. SPC and

teach in module

NF Flatmaster

Automated measurement of straightness, flatness and warpage

NF Solder

Automated off-line measurement of fine pitch solderpaste print in SMT production

NF AutoScan

Automated measurement of profiles and surfaces at arbitrary measurement

points

 

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